Handbook of sputter deposition technology: rinciples, technology and aplications : principles, technology and applications /

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Bibliographic Details
Main Author:	Wasa, Kiyotaka
Other Authors:	Hayakawa, Shigeru
Format:	Book
Language:	English
Published:	New Jersey : Noyes Publications, 1991.
Subjects:	Semiconductores Películas delgadas
Notas Contenido:	Thin film materials and devices Thin film processes Sputtering phenomena Sputtering systems Deposition of compound thin films Microfabrication by sputtering

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