APA (7th ed.) Citation

Wasa, K. (2004). Thin film materials technology: Sputtering of compound materials. William Andrew Publishing.

Chicago Style (17th ed.) Citation

Wasa, Kiyotaka. Thin Film Materials Technology: Sputtering of Compound Materials. New York: William Andrew Publishing, 2004.

MLA (9th ed.) Citation

Wasa, Kiyotaka. Thin Film Materials Technology: Sputtering of Compound Materials. William Andrew Publishing, 2004.

Warning: These citations may not always be 100% accurate.