Thin film materials technology : sputtering of compound materials /

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Bibliographic Details
Main Author: Wasa, Kiyotaka
Format: Book
Language: English
Published: New York : William Andrew Publishing, c2004.
Subjects:
Notas Contenido:
  • Thin film materials and derives
  • Thin film processes
  • Sputtering phenomena
  • Suttering systems
  • Deposition of compound thin films
  • Structural control of compound thin films: perovskite and nanometer oxide thin films.
Description
Physical Description:xiv, 518 páginas : ilustraciones ; 24 cm.
Bibliography:Incluye referencias bibliográficas e índices
ISBN:0815514832