Thin film materials technology : sputtering of compound materials /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
William Andrew Publishing,
c2004.
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| Notas Contenido: |
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| Physical Description: | xiv, 518 páginas : ilustraciones ; 24 cm. |
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| Bibliography: | Incluye referencias bibliográficas e índices |
| ISBN: | 0815514832 |