Thin film materials technology : sputtering of compound materials /

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Bibliographic Details
Main Author: Wasa, Kiyotaka
Format: Book
Language: English
Published: New York : William Andrew Publishing, c2004.
Subjects:
Notas Contenido:
  • Thin film materials and derives
  • Thin film processes
  • Sputtering phenomena
  • Suttering systems
  • Deposition of compound thin films
  • Structural control of compound thin films: perovskite and nanometer oxide thin films.

MARC

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100 1 |a Wasa, Kiyotaka 
245 1 0 |a Thin film materials technology :  |b sputtering of compound materials /  |c Kiyotaka Wasa, Mokoto Kitabateke, Hideaki Adachi. 
260 |a New York :  |b William Andrew Publishing,  |c c2004. 
300 |a xiv, 518 páginas :  |b ilustraciones ;  |c 24 cm. 
504 |a Incluye referencias bibliográficas e índices 
505 2 |a Thin film materials and derives -- Thin film processes -- Sputtering phenomena -- Suttering systems -- Deposition of compound thin films -- Structural control of compound thin films: perovskite and nanometer oxide thin films. 
650 1 7 |a Nanotecnología  |2 Armarc 
650 1 7 |a Alta tecnología  |2 Armarc 
650 1 7 |a Películas delgadas  |2 Armarc 
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