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Thin film materials technology : sputtering of compound materials /

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Bibliographic Details
Main Author:	Wasa, Kiyotaka
Format:	Book
Language:	English
Published:	New York : William Andrew Publishing, c2004.
Subjects:	Nanotecnología Alta tecnología Películas delgadas
Notas Contenido:	Thin film materials and derives Thin film processes Sputtering phenomena Suttering systems Deposition of compound thin films Structural control of compound thin films: perovskite and nanometer oxide thin films.

Table of Contents:

Thin film materials and derives
Thin film processes
Sputtering phenomena
Suttering systems
Deposition of compound thin films
Structural control of compound thin films: perovskite and nanometer oxide thin films.