Thin film deposition : principles and practice /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston :
McGraw-Hill,
c1995.
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Table of Contents:
- Thin film technology
- Gas kinetics
- Vacuum tecnhology
- Evaporation
- Deposition
- Epitaxy
- Chemical vapor deposition
- Energy beams
- Glow discharge plasmas
- Film analysis.