Thin film deposition : principles and practice /

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Bibliographic Details
Main Author:	Smith, Donald Leonard
Format:	Book
Language:	English
Published:	Boston : McGraw-Hill, c1995.
Subjects:	Películas delgadas Revestimientos Tecnología del vacio
Notas Contenido:	Thin film technology Gas kinetics Vacuum tecnhology Evaporation Deposition Epitaxy Chemical vapor deposition Energy beams Glow discharge plasmas Film analysis.

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