A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing.
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| Title: | A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing. |
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| Authors: | Bunn, J.1, Metting, C.1, Hattrick-Simpers, J.1, simpers@cec.sc.edu |
| Source: | JOM: The Journal of The Minerals, Metals & Materials Society (TMS); Jan2015, Vol. 67 Issue 1, p154-163, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10474838 |
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| DOI: | 10.1007/s11837-014-1234-2 |
