APA (7th ed.) Citation

Bunn, J., Metting, C., & Hattrick-Simpers, J. (2015). A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing. JOM: The Journal of The Minerals, Metals & Materials Society (TMS), 67(1), 154. https://doi.org/10.1007/s11837-014-1234-2

Chicago Style (17th ed.) Citation

Bunn, J., C. Metting, and J. Hattrick-Simpers. "A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing." JOM: The Journal of The Minerals, Metals & Materials Society (TMS) 67, no. 1 (2015): 154. https://doi.org/10.1007/s11837-014-1234-2.

MLA (9th ed.) Citation

Bunn, J., et al. "A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing." JOM: The Journal of The Minerals, Metals & Materials Society (TMS), vol. 67, no. 1, 2015, p. 154, https://doi.org/10.1007/s11837-014-1234-2.