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A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing.

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Title: A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing.
Authors: Bunn, J.1, Metting, C.1, Hattrick-Simpers, J.1, simpers@cec.sc.edu
Source: JOM: The Journal of The Minerals, Metals & Materials Society (TMS); Jan2015, Vol. 67 Issue 1, p154-163, 10p
Database: Applied Science & Technology Source
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        Value: 10.1007/s11837-014-1234-2
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        Text: English
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      – TitleFull: A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing.
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