A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing.
Saved in:
| Title: | A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing. |
|---|---|
| Authors: | Bunn, J.1, Metting, C.1, Hattrick-Simpers, J.1, simpers@cec.sc.edu |
| Source: | JOM: The Journal of The Minerals, Metals & Materials Society (TMS); Jan2015, Vol. 67 Issue 1, p154-163, 10p |
| Database: | Applied Science & Technology Source |
Be the first to leave a comment!
