Effect of substrate temperature on the arrangement of ultra-thin TiO2 films grown by a dc-magnetron sputtering deposition.
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| Title: | Effect of substrate temperature on the arrangement of ultra-thin TiO2 films grown by a dc-magnetron sputtering deposition. |
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| Authors: | Bukauskas, Virginijus1, virgis@pfi.lt, Kaciulis, Saulius2, Mezzi, Alessio2, Mironas, Audružis1, Niaura, Gediminas1, Rudzikas, Matas1, Šimkienė, Irena1, Šetkus, Arūnas1 |
| Source: | Thin Solid Films; Jun2015, Vol. 585, p5-12, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00406090 |
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| DOI: | 10.1016/j.tsf.2015.04.007 |
