Nanopowder management and control of plasma parameters in electronegative SiH[sub 4] plasmas.
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| Title: | Nanopowder management and control of plasma parameters in electronegative SiH[sub 4] plasmas. |
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| Authors: | Denysenko, I. B.1, syxu@nie.edu.sg, Ostrikov, K.2, Xu, S.1, Yu, M.Y.3, Diong, C. H.4 |
| Source: | Journal of Applied Physics; 11/1/2003, Vol. 94 Issue 9, p6097, 11p, 1 Chart, 7 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1618356 |
