Effect of sputtering yield changes on the depth resolution in cluster beam depth-profiling of polymers.
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| Title: | Effect of sputtering yield changes on the depth resolution in cluster beam depth-profiling of polymers. |
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| Authors: | Tuccitto, Nunzio1, n.tuccitto@unict.it, Bombace, Alessandra1, Torrisi, Alberto1, Licciardello, Antonino1 |
| Source: | Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2018, Vol. 36 Issue 3, pN.PAG-N.PAG, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 21662746 |
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| DOI: | 10.1116/1.5019698 |
