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Effect of sputtering yield changes on the depth resolution in cluster beam depth-profiling of polymers.

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Title: Effect of sputtering yield changes on the depth resolution in cluster beam depth-profiling of polymers.
Authors: Tuccitto, Nunzio1, n.tuccitto@unict.it, Bombace, Alessandra1, Torrisi, Alberto1, Licciardello, Antonino1
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2018, Vol. 36 Issue 3, pN.PAG-N.PAG, 4p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 129768925
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Effect of sputtering yield changes on the depth resolution in cluster beam depth-profiling of polymers.
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  Data: <searchLink fieldCode="AU" term="%22Tuccitto%2C+Nunzio%22">Tuccitto, Nunzio</searchLink><relatesTo>1</relatesTo>, <i>n.tuccitto@unict.it</i><br /><searchLink fieldCode="AU" term="%22Bombace%2C+Alessandra%22">Bombace, Alessandra</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Torrisi%2C+Alberto%22">Torrisi, Alberto</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Licciardello%2C+Antonino%22">Licciardello, Antonino</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+B-Nanotechnology+%26+Microelectronics%22">Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics</searchLink>; May2018, Vol. 36 Issue 3, pN.PAG-N.PAG, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=129768925
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/1.5019698
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 4
        StartPage: N.PAG
    Titles:
      – TitleFull: Effect of sputtering yield changes on the depth resolution in cluster beam depth-profiling of polymers.
        Type: main
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            NameFull: Tuccitto, Nunzio
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            NameFull: Bombace, Alessandra
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            NameFull: Torrisi, Alberto
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            – D: 01
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              Text: May2018
              Type: published
              Y: 2018
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              Value: 36
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          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
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