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Abnormal Relationship Between Hot Carrier Stress Degradation and Body Current in High-k Metal Gate in the 14-nm Node.

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Bibliographic Details
Title: Abnormal Relationship Between Hot Carrier Stress Degradation and Body Current in High-k Metal Gate in the 14-nm Node.
Authors: Chang, Kai-Chun1, Liao, Jih-Chien2, Chang, Ting-Chang1, tcchang3708@gmail.com, Yeh, Chien-Hung3, Lin, Chien-Yu3, Jin, Fu-Yuan1, Lin, Yu-Shan1, Ciou, Fong-Min1, Hung, Wei-Chun1, Lin, Yun-Hsuan1, Lien, Chen-Hsin2, Cheng, Osbert4, Huang, Cheng-Tung4, Ye, Yi-Han4
Source: IEEE Electron Device Letters; Apr2019, Vol. 40 Issue 4, p498-501, 4p
Database: Applied Science & Technology Source
Description
ISSN:07413106
DOI:10.1109/LED.2019.2899630