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Abnormal Relationship Between Hot Carrier Stress Degradation and Body Current in High-k Metal Gate in the 14-nm Node.

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Title: Abnormal Relationship Between Hot Carrier Stress Degradation and Body Current in High-k Metal Gate in the 14-nm Node.
Authors: Chang, Kai-Chun1, Liao, Jih-Chien2, Chang, Ting-Chang1, tcchang3708@gmail.com, Yeh, Chien-Hung3, Lin, Chien-Yu3, Jin, Fu-Yuan1, Lin, Yu-Shan1, Ciou, Fong-Min1, Hung, Wei-Chun1, Lin, Yun-Hsuan1, Lien, Chen-Hsin2, Cheng, Osbert4, Huang, Cheng-Tung4, Ye, Yi-Han4
Source: IEEE Electron Device Letters; Apr2019, Vol. 40 Issue 4, p498-501, 4p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 135773308
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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        Value: 10.1109/LED.2019.2899630
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        Text: English
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      – TitleFull: Abnormal Relationship Between Hot Carrier Stress Degradation and Body Current in High-k Metal Gate in the 14-nm Node.
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              Text: Apr2019
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