Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors.
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| Title: | Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors. |
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| Authors: | Setiono, Andi1,2,3, a.setiono@tu-braunschweig.de, Fahrbach, Michael1,3, Xu, Jiushuai1,3, Bertke, Maik1,3, Nyang'au, Wilson Ombati1,3,4, Hamdana, Gerry1,3, Wasisto, Hutomo Suryo1,3, Peiner, Erwin1,3 |
| Source: | Journal of Sensors & Sensor Systems; 2019, Vol. 8 Issue 1, p37-48, 12p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 21948771 |
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| DOI: | 10.5194/jsss-8-37-2019 |
