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Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors.

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Title: Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors.
Authors: Setiono, Andi1,2,3, a.setiono@tu-braunschweig.de, Fahrbach, Michael1,3, Xu, Jiushuai1,3, Bertke, Maik1,3, Nyang'au, Wilson Ombati1,3,4, Hamdana, Gerry1,3, Wasisto, Hutomo Suryo1,3, Peiner, Erwin1,3
Source: Journal of Sensors & Sensor Systems; 2019, Vol. 8 Issue 1, p37-48, 12p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 137751367
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PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors.
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  Data: <searchLink fieldCode="AU" term="%22Setiono%2C+Andi%22">Setiono, Andi</searchLink><relatesTo>1,2,3</relatesTo>, <i>a.setiono@tu-braunschweig.de</i><br /><searchLink fieldCode="AU" term="%22Fahrbach%2C+Michael%22">Fahrbach, Michael</searchLink><relatesTo>1,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Xu%2C+Jiushuai%22">Xu, Jiushuai</searchLink><relatesTo>1,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Bertke%2C+Maik%22">Bertke, Maik</searchLink><relatesTo>1,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Nyang'au%2C+Wilson Ombati%22">Nyang'au, Wilson Ombati</searchLink><relatesTo>1,3,4</relatesTo><br /><searchLink fieldCode="AU" term="%22Hamdana%2C+Gerry%22">Hamdana, Gerry</searchLink><relatesTo>1,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Wasisto%2C+Hutomo Suryo%22">Wasisto, Hutomo Suryo</searchLink><relatesTo>1,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Peiner%2C+Erwin%22">Peiner, Erwin</searchLink><relatesTo>1,3</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Sensors+%26+Sensor+Systems%22">Journal of Sensors & Sensor Systems</searchLink>; 2019, Vol. 8 Issue 1, p37-48, 12p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=137751367
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.5194/jsss-8-37-2019
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      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 12
        StartPage: 37
    Titles:
      – TitleFull: Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors.
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            NameFull: Setiono, Andi
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            NameFull: Fahrbach, Michael
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            NameFull: Xu, Jiushuai
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            NameFull: Bertke, Maik
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            NameFull: Nyang'au, Wilson Ombati
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            NameFull: Hamdana, Gerry
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            NameFull: Wasisto, Hutomo Suryo
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              Text: 2019
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            – TitleFull: Journal of Sensors & Sensor Systems
              Type: main
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