Reprint of: Sterilization of small vial using electron cyclotron resonance plasma.
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| Title: | Reprint of: Sterilization of small vial using electron cyclotron resonance plasma. |
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| Authors: | Nishikawa, Tatsuya1,2, 3ES18202N@s.kyushu-u.ac.jp, Abe, Norihito1, Yonesu, Akira1, Hayashi, Nobuya2 |
| Source: | Vacuum; Sep2019, Vol. 167, p586-590, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
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| DOI: | 10.1016/j.vacuum.2019.03.044 |
