Pulsed laser deposition with rapid beam deflection by a galvanometer mirror scanner.
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| Title: | Pulsed laser deposition with rapid beam deflection by a galvanometer mirror scanner. |
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| Authors: | Maruyama, S.1, Sannodo, N.1, Harada, R.1, Anada, Y.1, Takahashi, R.2, Lippmaa, M.2, Matsumoto, Y.1, y-matsumoto@tohoku.ac.jp |
| Source: | Review of Scientific Instruments; Sep2019, Vol. 90 Issue 9, pN.PAG-N.PAG, 9p, 4 Diagrams, 3 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00346748 |
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| DOI: | 10.1063/1.5104291 |
