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A two-port electrothermal model for suspended MEMS device structures with multiple inputs.

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Bibliographic Details
Title: A two-port electrothermal model for suspended MEMS device structures with multiple inputs.
Authors: Schoeman, Johan1, j.schoeman@up.ac.za, du Plessis, Monuko1
Source: Journal of Sensors & Sensor Systems; 2019, Vol. 8 Issue 2, p293-304, 12p
Database: Applied Science & Technology Source
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Description
ISSN:21948771
DOI:10.5194/jsss-8-293-2019