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Three-Dimensional Two-Temperature Modeling of Ar Loop-Type Inductively Coupled Thermal Plasma for Surface Modification.

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Bibliographic Details
Title: Three-Dimensional Two-Temperature Modeling of Ar Loop-Type Inductively Coupled Thermal Plasma for Surface Modification.
Authors: Ozeki, Genki1, ohzeki@stu.kanazawa-u.ac.jp, Tanaka, Yasunori1, tanaka@ec.t.kanazawa-u.ac.jp, Sugiyama, Y1, Nakano, Y1, Ishijima, T1, Uesugi, Y1, Yukimoto, T2, Kawaura, H2
Source: Plasma Chemistry & Plasma Processing; 2021, Vol. 41 Issue 1, p85-108, 24p
Database: Applied Science & Technology Source
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ISSN:02724324
DOI:10.1007/s11090-020-10144-5