Al:ZnO top electrodes deposited with various oxygen pressures for ferroelectric (Pb,La)(Zr,Ti)O3 capacitors.
Saved in:
| Title: | Al:ZnO top electrodes deposited with various oxygen pressures for ferroelectric (Pb,La)(Zr,Ti)O3 capacitors. |
|---|---|
| Authors: | Takada, Y.1, ytakada@chemeng.osakafu-u.ac.jp, Okamoto, N.1, Saito, T.1, Kondo, K.1, Yoshimura, T.2, Fujimura, N.2, Higuchi, K.3, Kitajima, A.3 |
| Source: | Electronics Letters (Wiley-Blackwell); Feb2016, Vol. 52 Issue 3, p230-232, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00135194 |
|---|---|
| DOI: | 10.1049/el.2015.3539 |
