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Cu-Doped TiN x O y Thin Film Resistors DC/RF Performance and Reliability.

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Title: Cu-Doped TiN x O y Thin Film Resistors DC/RF Performance and Reliability.
Authors: Shanidze, Lev V.1, shanidze.l.v@mail.ru, Tarasov, Anton S.1,2, taras@iph.krasn.ru, Rautskiy, Mikhail V.1, rmv@iph.krasn.ru, Zelenov, Fyodor V.3, fyodor.zelenov@yandex.ru, Konovalov, Stepan O.3, kco.konovalov@yandex.ru, Nemtsev, Ivan V.1,2, ivan_nemtsev@mail.ru, Voloshin, Alexander S.1,2, avoloshin@sfu-kras.ru, Tarasov, Ivan A.1, tia@iph.krasn.ru, Baron, Filipp A.1, spintron@hotmail.comvolk@iph.krasn.ru, Volkov, Nikita V.1
Source: Applied Sciences (2076-3417); Aug2021, Vol. 11 Issue 16, p7498, 11p
Database: Applied Science & Technology Source
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ISSN:20763417
DOI:10.3390/app11167498