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Deep learning in optical metrology: a review.

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Bibliographic Details
Title: Deep learning in optical metrology: a review.
Authors: Zuo, Chao1,2, zuochao@njust.edu.cn, Qian, Jiaming1,2, Feng, Shijie1,2, Yin, Wei1,2, Li, Yixuan1,2, Fan, Pengfei1,2,3, Han, Jing2, Qian, Kemao4, mkmqian@ntu.edu.sg, Chen, Qian2, chenqian@njust.edu.cn
Source: Light: Science & Applications; 2/23/2022, Vol. 11 Issue 1, p1-54, 54p
Database: Applied Science & Technology Source
Description
ISSN:20477538
DOI:10.1038/s41377-022-00714-x