Thinning of the Backside of the InSb(100) Matrix Module and Its Effect on the Crystal Structure of Near Surface Layers.
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| Title: | Thinning of the Backside of the InSb(100) Matrix Module and Its Effect on the Crystal Structure of Near Surface Layers. |
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| Authors: | Mirofyanchenko, E. V.1,2, mirofianchenko@gmail.com, Mirofyanchenko, A. E.1,2, Popov, V. S.1,2 |
| Source: | Journal of Communications Technology & Electronics; Mar2022, Vol. 67 Issue 3, p313-318, 6p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 10642269 |
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| DOI: | 10.1134/S1064226922030111 |