Comparative Study of Influence of Simultaneous Modulation of Upper-Coil and Lower-Coil Currents on Silicon Nanoparticles Synthesized Using Tandem-Type Modulated Induction Thermal Plasmas.
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| Title: | Comparative Study of Influence of Simultaneous Modulation of Upper-Coil and Lower-Coil Currents on Silicon Nanoparticles Synthesized Using Tandem-Type Modulated Induction Thermal Plasmas. |
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| Authors: | Furukawa, Ryudai1, falcon@stu.kanazawa-u.ac.jp, Tanaka, Yasunori1, tanaka@ec.t.kanazawa-u.ac.jp, Nagase, Y.1, Nakano, Y.1, Ishijima, T.1, Sueyasu, S.2, Watanabe, S.2, Nakamura, K.2 |
| Source: | Plasma Chemistry & Plasma Processing; May2022, Vol. 42 Issue 3, p435-463, 29p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 02724324 |
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| DOI: | 10.1007/s11090-022-10230-w |
