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The Atomic Layer Etching Technique with Surface Treatment Function for InAlN/GaN Heterostructure.

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Title: The Atomic Layer Etching Technique with Surface Treatment Function for InAlN/GaN Heterostructure.
Authors: Du, Fangzhou1, 11811803@mail.sustech.edu.cn, Jiang, Yang1, 11510044@mail.sustech.edu.cn, Wu, Zhanxia2, wuzhanxia@sgitg.sgcc.com.cn, Lu, Honghao1, 12032648@mail.sustech.edu.cn, He, Jiaqi1, hjq447052447@163.com, Tang, Chuying1, 12049024@mail.sustech.edu.cn, Hu, Qiaoyu1, 11930627@mail.sustech.edu.cn, Wen, Kangyao1, 19212020080@fudan.edu.cn, Tang, Xinyi1, 11810232@mail.sustech.edu.cn, Hong, Haimin2, honghaimin@sgitg.sgcc.com.cn, Yu, Hongyu1,3,4, yuhy@sustech.edu.cn, Wang, Qing1,3,4, wangq7@sustech.edu.cn
Source: Crystals (2073-4352); May2022, Vol. 12 Issue 5, pN.PAG-N.PAG, 11p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 157191672
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PubTypeId: academicJournal
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  Data: The Atomic Layer Etching Technique with Surface Treatment Function for InAlN/GaN Heterostructure.
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  Data: <searchLink fieldCode="AU" term="%22Du%2C+Fangzhou%22">Du, Fangzhou</searchLink><relatesTo>1</relatesTo>, <i>11811803@mail.sustech.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Jiang%2C+Yang%22">Jiang, Yang</searchLink><relatesTo>1</relatesTo>, <i>11510044@mail.sustech.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Wu%2C+Zhanxia%22">Wu, Zhanxia</searchLink><relatesTo>2</relatesTo>, <i>wuzhanxia@sgitg.sgcc.com.cn</i><br /><searchLink fieldCode="AU" term="%22Lu%2C+Honghao%22">Lu, Honghao</searchLink><relatesTo>1</relatesTo>, <i>12032648@mail.sustech.edu.cn</i><br /><searchLink fieldCode="AU" term="%22He%2C+Jiaqi%22">He, Jiaqi</searchLink><relatesTo>1</relatesTo>, <i>hjq447052447@163.com</i><br /><searchLink fieldCode="AU" term="%22Tang%2C+Chuying%22">Tang, Chuying</searchLink><relatesTo>1</relatesTo>, <i>12049024@mail.sustech.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Hu%2C+Qiaoyu%22">Hu, Qiaoyu</searchLink><relatesTo>1</relatesTo>, <i>11930627@mail.sustech.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Wen%2C+Kangyao%22">Wen, Kangyao</searchLink><relatesTo>1</relatesTo>, <i>19212020080@fudan.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Tang%2C+Xinyi%22">Tang, Xinyi</searchLink><relatesTo>1</relatesTo>, <i>11810232@mail.sustech.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Hong%2C+Haimin%22">Hong, Haimin</searchLink><relatesTo>2</relatesTo>, <i>honghaimin@sgitg.sgcc.com.cn</i><br /><searchLink fieldCode="AU" term="%22Yu%2C+Hongyu%22">Yu, Hongyu</searchLink><relatesTo>1,3,4</relatesTo>, <i>yuhy@sustech.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Wang%2C+Qing%22">Wang, Qing</searchLink><relatesTo>1,3,4</relatesTo>, <i>wangq7@sustech.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Crystals+%282073-4352%29%22">Crystals (2073-4352)</searchLink>; May2022, Vol. 12 Issue 5, pN.PAG-N.PAG, 11p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=157191672
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        Value: 10.3390/cryst12050722
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        Text: English
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              M: 05
              Text: May2022
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