Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing.
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| Title: | Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing. |
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| Authors: | Fan, Shu-Kai S.1, morrisfan@ntut.edu.tw, Hsu, Chia-Yu1, Tsai, Du-Ming2, Chou, Mabel C.3, bizchoum@nus.edu.sg, Jen, Chih-Hung4, Tsou, Jen-Hsuan1 |
| Source: | IEEE Transactions on Automation Science & Engineering; Jul2022, Vol. 19 Issue 3, p1530-1541, 12p |
| Database: | Applied Science & Technology Source |
| ISSN: | 15455955 |
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| DOI: | 10.1109/TASE.2022.3141426 |
