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Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing.

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Title: Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing.
Authors: Fan, Shu-Kai S.1, morrisfan@ntut.edu.tw, Hsu, Chia-Yu1, Tsai, Du-Ming2, Chou, Mabel C.3, bizchoum@nus.edu.sg, Jen, Chih-Hung4, Tsou, Jen-Hsuan1
Source: IEEE Transactions on Automation Science & Engineering; Jul2022, Vol. 19 Issue 3, p1530-1541, 12p
Database: Applied Science & Technology Source
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  Data: Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing.
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        Value: 10.1109/TASE.2022.3141426
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              Text: Jul2022
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