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Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions.

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Bibliographic Details
Title:	Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions.
Authors:	Liu, Chengze¹, Zhang, Menglun¹, zml@tju.edu.cn, Sun, Mingchao¹, Xu, Linbing¹, Lang, Yiming¹, Gong, Shaobo¹, Pang, Wei¹, weipang@tju.edu.cn
Source:	Journal of Microelectromechanical Systems; Aug2022, Vol. 31 Issue 4, p664-672, 9p
Database:	Applied Science & Technology Source

Description
ISSN:	10577157
DOI:	10.1109/JMEMS.2022.3181666