APA (7th ed.) Citation

Liu, C., Zhang, M., Sun, M., Xu, L., Lang, Y., Gong, S., & Pang, W. (2022). Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions. Journal of Microelectromechanical Systems, 31(4), 664. https://doi.org/10.1109/JMEMS.2022.3181666

Chicago Style (17th ed.) Citation

Liu, Chengze, Menglun Zhang, Mingchao Sun, Linbing Xu, Yiming Lang, Shaobo Gong, and Wei Pang. "Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions." Journal of Microelectromechanical Systems 31, no. 4 (2022): 664. https://doi.org/10.1109/JMEMS.2022.3181666.

MLA (9th ed.) Citation

Liu, Chengze, et al. "Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions." Journal of Microelectromechanical Systems, vol. 31, no. 4, 2022, p. 664, https://doi.org/10.1109/JMEMS.2022.3181666.