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Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions.

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Bibliographic Details
Title: Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions.
Authors: Liu, Chengze1, Zhang, Menglun1, zml@tju.edu.cn, Sun, Mingchao1, Xu, Linbing1, Lang, Yiming1, Gong, Shaobo1, Pang, Wei1, weipang@tju.edu.cn
Source: Journal of Microelectromechanical Systems; Aug2022, Vol. 31 Issue 4, p664-672, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 158333483
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1109/JMEMS.2022.3181666
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      – Code: eng
        Text: English
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        PageCount: 9
        StartPage: 664
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      – TitleFull: Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions.
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          Name:
            NameFull: Liu, Chengze
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            NameFull: Zhang, Menglun
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            NameFull: Sun, Mingchao
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            NameFull: Xu, Linbing
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            NameFull: Lang, Yiming
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            NameFull: Gong, Shaobo
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            NameFull: Pang, Wei
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            – D: 01
              M: 08
              Text: Aug2022
              Type: published
              Y: 2022
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              Value: 31
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            – TitleFull: Journal of Microelectromechanical Systems
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