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Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions.

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Bibliographic Details
Title: Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions.
Authors: Liu, Chengze1, Zhang, Menglun1, zml@tju.edu.cn, Sun, Mingchao1, Xu, Linbing1, Lang, Yiming1, Gong, Shaobo1, Pang, Wei1, weipang@tju.edu.cn
Source: Journal of Microelectromechanical Systems; Aug2022, Vol. 31 Issue 4, p664-672, 9p
Database: Applied Science & Technology Source
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