Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films.
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| Title: | Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films. |
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| Authors: | Wang, Yi1,2, yi.wang@kit.edu, Gehring, Tim1, Jin, Qihao1, Dycke, Jan1, Kling, Rainer1 |
| Source: | Coatings (2079-6412); Feb2023, Vol. 13 Issue 2, p368, 14p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20796412 |
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| DOI: | 10.3390/coatings13020368 |
