Wang, Y., Gehring, T., Jin, Q., Dycke, J., & Kling, R. (2023). Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films. Coatings (2079-6412), 13(2), 368. https://doi.org/10.3390/coatings13020368
Chicago Style (17th ed.) CitationWang, Yi, Tim Gehring, Qihao Jin, Jan Dycke, and Rainer Kling. "Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films." Coatings (2079-6412) 13, no. 2 (2023): 368. https://doi.org/10.3390/coatings13020368.
MLA (9th ed.) CitationWang, Yi, et al. "Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films." Coatings (2079-6412), vol. 13, no. 2, 2023, p. 368, https://doi.org/10.3390/coatings13020368.