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Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films.

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Title: Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films.
Authors: Wang, Yi1,2, yi.wang@kit.edu, Gehring, Tim1, Jin, Qihao1, Dycke, Jan1, Kling, Rainer1
Source: Coatings (2079-6412); Feb2023, Vol. 13 Issue 2, p368, 14p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 162117584
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PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films.
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  Data: <searchLink fieldCode="JN" term="%22Coatings+%282079-6412%29%22">Coatings (2079-6412)</searchLink>; Feb2023, Vol. 13 Issue 2, p368, 14p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=162117584
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      – Type: doi
        Value: 10.3390/coatings13020368
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      – Code: eng
        Text: English
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        PageCount: 14
        StartPage: 368
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      – TitleFull: Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films.
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            NameFull: Wang, Yi
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            NameFull: Gehring, Tim
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            NameFull: Jin, Qihao
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              M: 02
              Text: Feb2023
              Type: published
              Y: 2023
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              Value: 20796412
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              Value: 13
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              Value: 2
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            – TitleFull: Coatings (2079-6412)
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