Current collapse suppression in AlGaN/GaN HEMTs using dual-layer SiNx stressor passivation.
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| Title: | Current collapse suppression in AlGaN/GaN HEMTs using dual-layer SiNx stressor passivation. |
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| Authors: | Deng, Chenkai1,2, Cheng, Wei-Chih1, Chen, XiGuang1, Wen, KangYao1,3, He, MingHao1,4, Tang, ChuYing1,2, Wang, Peiran1, Wang, Qing1,5,6, wangq7@sustech.edu.cn, Yu, HongYu1,5,6, yuhy@sustech.edu.cn |
| Source: | Applied Physics Letters; 6/5/2023, Vol. 122 Issue 23, p1-5, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0135074 |
