Current collapse suppression in AlGaN/GaN HEMTs using dual-layer SiNx stressor passivation.
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| Title: | Current collapse suppression in AlGaN/GaN HEMTs using dual-layer SiNx stressor passivation. |
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| Authors: | Deng, Chenkai1,2, Cheng, Wei-Chih1, Chen, XiGuang1, Wen, KangYao1,3, He, MingHao1,4, Tang, ChuYing1,2, Wang, Peiran1, Wang, Qing1,5,6, wangq7@sustech.edu.cn, Yu, HongYu1,5,6, yuhy@sustech.edu.cn |
| Source: | Applied Physics Letters; 6/5/2023, Vol. 122 Issue 23, p1-5, 5p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 164244585 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=164244585 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/5.0135074 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 5 StartPage: 1 Titles: – TitleFull: Current collapse suppression in AlGaN/GaN HEMTs using dual-layer SiNx stressor passivation. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Deng, Chenkai – PersonEntity: Name: NameFull: Cheng, Wei-Chih – PersonEntity: Name: NameFull: Chen, XiGuang – PersonEntity: Name: NameFull: Wen, KangYao – PersonEntity: Name: NameFull: He, MingHao – PersonEntity: Name: NameFull: Tang, ChuYing – PersonEntity: Name: NameFull: Wang, Peiran – PersonEntity: Name: NameFull: Wang, Qing – PersonEntity: Name: NameFull: Yu, HongYu IsPartOfRelationships: – BibEntity: Dates: – D: 05 M: 06 Text: 6/5/2023 Type: published Y: 2023 Identifiers: – Type: issn-print Value: 00036951 Numbering: – Type: volume Value: 122 – Type: issue Value: 23 Titles: – TitleFull: Applied Physics Letters Type: main |
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