Why thermal laser epitaxy aluminum sources yield reproducible fluxes in oxidizing environments.

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Bibliographic Details
Title: Why thermal laser epitaxy aluminum sources yield reproducible fluxes in oxidizing environments.
Authors: Smart, Thomas J.1, Hensling, Felix V. E.1,2, f.hensling@fkf.mpg.de, Kim, Dong Yeong1, Majer, Lena N.1, Suyolcu, Y. Eren2, Dereh, Dominik1, Schlom, Darrell G.2,3,4, Jena, Debdeep2,4,5, Mannhart, Jochen1, Braun, Wolfgang1, w.braun@fkf.mpg.de
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2023, Vol. 41 Issue 4, p1-6, 6p
Database: Applied Science & Technology Source
Description
ISSN:07342101
DOI:10.1116/6.0002632