Thin-film PMUTs: a review of over 40 years of research.
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| Title: | Thin-film PMUTs: a review of over 40 years of research. |
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| Authors: | Roy, Kaustav1,2, Lee, Joshua En-Yuan3, Lee, Chengkuo1,2, elelc@nus.edu.sg |
| Source: | Microsystems & Nanoengineering; 7/21/2023, Vol. 9 Issue 1, p1-17, 17p |
| Database: | Applied Science & Technology Source |
| ISSN: | 20961030 |
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| DOI: | 10.1038/s41378-023-00555-7 |
