20.4: Activation of Doped Silicon Film Using Semiconductor Blue Light Diode Laser Annealing.
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| Title: | 20.4: Activation of Doped Silicon Film Using Semiconductor Blue Light Diode Laser Annealing. |
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| Authors: | Yang, Y.1, yi-yang@vtec.co.jp, Kinoshita, M.1, Okuno, T.1, Hashizume, M.1, Saito, K.1, Sawai, T.1, Gotoh, J.1, Sugimoto, S.1 |
| Source: | SID Symposium Digest of Technical Papers; Apr2023 Supplement 1, Vol. 54, p157-160, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0097966X |
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| DOI: | 10.1002/sdtp.16251 |
