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Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films.

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Title: Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films.
Authors: Gao, Yan1, Dong, Haitao1, Zhang, Xiaoke1, Feng, Wenran1, fengwenran@bipt.edu.cn
Source: Journal of Electronic Materials; Nov2023, Vol. 52 Issue 11, p7429-7437, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 172843602
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films.
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  Data: <searchLink fieldCode="AU" term="%22Gao%2C+Yan%22">Gao, Yan</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Dong%2C+Haitao%22">Dong, Haitao</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Xiaoke%22">Zhang, Xiaoke</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Feng%2C+Wenran%22">Feng, Wenran</searchLink><relatesTo>1</relatesTo>, <i>fengwenran@bipt.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Electronic+Materials%22">Journal of Electronic Materials</searchLink>; Nov2023, Vol. 52 Issue 11, p7429-7437, 9p
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1007/s11664-023-10673-7
    Languages:
      – Code: eng
        Text: English
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        PageCount: 9
        StartPage: 7429
    Titles:
      – TitleFull: Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films.
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            NameFull: Gao, Yan
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            NameFull: Dong, Haitao
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            NameFull: Zhang, Xiaoke
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            NameFull: Feng, Wenran
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            – D: 01
              M: 11
              Text: Nov2023
              Type: published
              Y: 2023
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              Value: 03615235
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              Value: 52
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              Value: 11
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            – TitleFull: Journal of Electronic Materials
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