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Theoretical study on tin oxide surface chemistry mechanism and thermodynamic properties for atomic layer deposition equipment optimization.

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Bibliographic Details
Title: Theoretical study on tin oxide surface chemistry mechanism and thermodynamic properties for atomic layer deposition equipment optimization.
Authors: Wang, Pengkai1, Wu, Yongshuan1, Wu, Tianxiang1, Xiao, Jinqing1, Xu, Wei2, Peng, Yichang2, Li, Junhui1, lijunhui@csu.edu.cn
Source: Journal of Materials Science; Oct2023, Vol. 58 Issue 40, p15634-15646, 13p, 3 Charts, 7 Graphs
Database: Applied Science & Technology Source
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Description
ISSN:00222461
DOI:10.1007/s10853-023-09007-z