APA (7th ed.) Citation

Wang, P., Wu, Y., Wu, T., Xiao, J., Xu, W., Peng, Y., & Li, J. (2023). Theoretical study on tin oxide surface chemistry mechanism and thermodynamic properties for atomic layer deposition equipment optimization. Journal of Materials Science, 58(40), 15634. https://doi.org/10.1007/s10853-023-09007-z

Chicago Style (17th ed.) Citation

Wang, Pengkai, Yongshuan Wu, Tianxiang Wu, Jinqing Xiao, Wei Xu, Yichang Peng, and Junhui Li. "Theoretical Study on Tin Oxide Surface Chemistry Mechanism and Thermodynamic Properties for Atomic Layer Deposition Equipment Optimization." Journal of Materials Science 58, no. 40 (2023): 15634. https://doi.org/10.1007/s10853-023-09007-z.

MLA (9th ed.) Citation

Wang, Pengkai, et al. "Theoretical Study on Tin Oxide Surface Chemistry Mechanism and Thermodynamic Properties for Atomic Layer Deposition Equipment Optimization." Journal of Materials Science, vol. 58, no. 40, 2023, p. 15634, https://doi.org/10.1007/s10853-023-09007-z.