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Theoretical study on tin oxide surface chemistry mechanism and thermodynamic properties for atomic layer deposition equipment optimization.

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Title: Theoretical study on tin oxide surface chemistry mechanism and thermodynamic properties for atomic layer deposition equipment optimization.
Authors: Wang, Pengkai1, Wu, Yongshuan1, Wu, Tianxiang1, Xiao, Jinqing1, Xu, Wei2, Peng, Yichang2, Li, Junhui1, lijunhui@csu.edu.cn
Source: Journal of Materials Science; Oct2023, Vol. 58 Issue 40, p15634-15646, 13p, 3 Charts, 7 Graphs
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 173396408
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Theoretical study on tin oxide surface chemistry mechanism and thermodynamic properties for atomic layer deposition equipment optimization.
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  Data: <searchLink fieldCode="AU" term="%22Wang%2C+Pengkai%22">Wang, Pengkai</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Wu%2C+Yongshuan%22">Wu, Yongshuan</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Wu%2C+Tianxiang%22">Wu, Tianxiang</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Xiao%2C+Jinqing%22">Xiao, Jinqing</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Xu%2C+Wei%22">Xu, Wei</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Peng%2C+Yichang%22">Peng, Yichang</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+Junhui%22">Li, Junhui</searchLink><relatesTo>1</relatesTo>, <i>lijunhui@csu.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%22">Journal of Materials Science</searchLink>; Oct2023, Vol. 58 Issue 40, p15634-15646, 13p, 3 Charts, 7 Graphs
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=173396408
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s10853-023-09007-z
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      – Code: eng
        Text: English
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        PageCount: 13
        StartPage: 15634
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      – TitleFull: Theoretical study on tin oxide surface chemistry mechanism and thermodynamic properties for atomic layer deposition equipment optimization.
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          Name:
            NameFull: Wang, Pengkai
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            NameFull: Wu, Yongshuan
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            NameFull: Wu, Tianxiang
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            NameFull: Xiao, Jinqing
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            NameFull: Xu, Wei
      – PersonEntity:
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            NameFull: Peng, Yichang
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            NameFull: Li, Junhui
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            – D: 27
              M: 10
              Text: Oct2023
              Type: published
              Y: 2023
          Identifiers:
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              Value: 00222461
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              Value: 58
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              Value: 40
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            – TitleFull: Journal of Materials Science
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