View in EDS HTML Full Text PDF Full Text

Fabrication of SiC-on-Insulator (SiCOI) Layers by Chemical Vapor Deposition of 3C-SiC on Si-in-Insulator Substrates at Low Deposition Temperatures of 1120 °C.

Saved in:
Bibliographic Details
Title: Fabrication of SiC-on-Insulator (SiCOI) Layers by Chemical Vapor Deposition of 3C-SiC on Si-in-Insulator Substrates at Low Deposition Temperatures of 1120 °C.
Authors: Steiner, Johannes1, shouzhong.wang@fau.de, Schultheiß, Jana1, Wang, Shouzhong1, Wellmann, Peter J.1, peter.wellmann@fau.de
Source: Crystals (2073-4352); Nov2023, Vol. 13 Issue 11, p1590, 9p
Database: Applied Science & Technology Source
Full text is not displayed to guests.
FullText Links:
  – Type: pdflink
Text:
  Availability: 1
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 173827774
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Fabrication of SiC-on-Insulator (SiCOI) Layers by Chemical Vapor Deposition of 3C-SiC on Si-in-Insulator Substrates at Low Deposition Temperatures of 1120 °C.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Steiner%2C+Johannes%22">Steiner, Johannes</searchLink><relatesTo>1</relatesTo>, <i>shouzhong.wang@fau.de</i><br /><searchLink fieldCode="AU" term="%22Schultheiß%2C+Jana%22">Schultheiß, Jana</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Wang%2C+Shouzhong%22">Wang, Shouzhong</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Wellmann%2C+Peter+J%2E%22">Wellmann, Peter J.</searchLink><relatesTo>1</relatesTo>, <i>peter.wellmann@fau.de</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Crystals+%282073-4352%29%22">Crystals (2073-4352)</searchLink>; Nov2023, Vol. 13 Issue 11, p1590, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=173827774
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.3390/cryst13111590
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 9
        StartPage: 1590
    Titles:
      – TitleFull: Fabrication of SiC-on-Insulator (SiCOI) Layers by Chemical Vapor Deposition of 3C-SiC on Si-in-Insulator Substrates at Low Deposition Temperatures of 1120 °C.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Steiner, Johannes
      – PersonEntity:
          Name:
            NameFull: Schultheiß, Jana
      – PersonEntity:
          Name:
            NameFull: Wang, Shouzhong
      – PersonEntity:
          Name:
            NameFull: Wellmann, Peter J.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 11
              Text: Nov2023
              Type: published
              Y: 2023
          Identifiers:
            – Type: issn-print
              Value: 20734352
          Numbering:
            – Type: volume
              Value: 13
            – Type: issue
              Value: 11
          Titles:
            – TitleFull: Crystals (2073-4352)
              Type: main
ResultId 1