Comparative study of (Ba,Sr)TiO3 films prepared by electron cyclotron resonance plasma sputtering and metal-organic decomposition
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| Title: | Comparative study of (Ba,Sr)TiO3 films prepared by electron cyclotron resonance plasma sputtering and metal-organic decomposition |
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| Authors: | Matsumoto, T.1, matsutake@dream.com, Niino, A.1, Numata, K.2, Saito, H.2, Miyake, S.1 |
| Source: | Thin Solid Films; Apr2005, Vol. 476 Issue 1, p73-78, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00406090 |
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| DOI: | 10.1016/j.tsf.2004.09.017 |
