APA (7th ed.) Citation

Matsumoto, T., Niino, A., Numata, K., Saito, H., & Miyake, S. (2005). Comparative study of (Ba,Sr)TiO3 films prepared by electron cyclotron resonance plasma sputtering and metal-organic decomposition. Thin Solid Films, 476(1), 73. https://doi.org/10.1016/j.tsf.2004.09.017

Chicago Style (17th ed.) Citation

Matsumoto, T., A. Niino, K. Numata, H. Saito, and S. Miyake. "Comparative Study of (Ba,Sr)TiO3 Films Prepared by Electron Cyclotron Resonance Plasma Sputtering and Metal-organic Decomposition." Thin Solid Films 476, no. 1 (2005): 73. https://doi.org/10.1016/j.tsf.2004.09.017.

MLA (9th ed.) Citation

Matsumoto, T., et al. "Comparative Study of (Ba,Sr)TiO3 Films Prepared by Electron Cyclotron Resonance Plasma Sputtering and Metal-organic Decomposition." Thin Solid Films, vol. 476, no. 1, 2005, p. 73, https://doi.org/10.1016/j.tsf.2004.09.017.